subfab
nounEtymology From sub- + fab.
1
The area underneath a semiconductor fabrication plant
- Line A involved a 121,000 ft 2 area, with downdraft laminar flow and flow-through ventilation from fab to subfab areas; the facility uses an open bay and chase design, such that SEGs may overlap within process bays or maintenance chases.2015 September 6, Rachael M. Jones et al., “Exposure Reconstruction and Risk Analysis for Six Semiconductor Workers With Lymphohematopoietic Cancers”, in Journal of Occupational and Environmental Medicine, volume 57, →DOI: