microelectromechanical system
nounEtymology From microelectromechanical + system.
1
an electromechanical system composed of micron-sized components (of the range 1μm–100μm) in a millimetre-sized system (of the range 0.02mm–1mm)
- Derived terms
- microelectromechanical systems, MEMS
- Related terms
- nanoelectromechanical system